Fabrication of flexible amorphous-Si thin-film solar cells on a parylene template using a direct separation process

Shih Yung Lo*, Dong Sing Wuu, Chia Hao Chang, Chao Chun Wang, Shui Yang Lien, Ray-Hua Horng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


In this paper, we report on the fabrication of flexible amorphous-silicon (a-Si) thin-film solar cells on a parylene template carried by a glass plate without any adhesive. The a-Si thin-film solar cells could be separated directly from the glass carrier after a process temperature of up to 200 °C. The a-Si and parylene films were deposited using high-frequency plasma-enhanced chemical vapor deposition and a parylene reactor. The parylene-coated glass plate was treated with thermal annealing and Ar, N 2 , or O 2 plasma. Moreover, SiN x and/or SiO x films were used as barrier layers between the transparent conductive oxide and parylene films. Details of different gas plasmas and barrier effects were investigated in terms of surface morphologies and solar cell characteristics. The a-Si thin-film solar cell on a parylene template with an open-circuit voltage of 0.74 V, a short-circuit current density of 15.69 mA/cm 2 , a fill factor of 54.98%, and a conversion efficiency of 5.78 % could be obtained. After the 10-mm-radius bending test for 5000 times, the a-Si thin-film solar cells still exhibited a conversion efficiency of 4.94%. These results indicated that a-Si thin-film solar cells on parylene templates have high potential for flexible photovoltaic applications.

Original languageEnglish
Article number5742692
Pages (from-to)1433-1439
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number5
StatePublished - 1 May 2011


  • Amorphous silicon (a-Si)
  • direct separation
  • flexible
  • parylene
  • solar cell

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