Fabrication of curved structures with electron-beam and surface structure characterization

Jem Kun Chen, Fu-Hsiang Ko*, Hsuan Ko Chen, Cheng Tung Chou, Hsuen Li Chen, Feng Chih Chang

*Corresponding author for this work

Research output: Contribution to journalArticle

7 Scopus citations

Abstract

The sensitivity, chemical reactivity, and thermal stability of SU-8 polymer film that was exposed to a shaped electron beam, toward treatment with an oxygen plasma were discussed. The chemical bond and the film were stabilized through polymerization with the help of oxygen plasma. The increase in the dosage of the electron beam or the treatment time of the oxygen plasma was decreased by Fourier transform infrared spectra of epoxy bonds. Using a gradient dosing strategy, convex, concave and spiral structures were successfully formed.

Original languageEnglish
Pages (from-to)492-500
Number of pages9
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number2
DOIs
StatePublished - 1 Mar 2004

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