The sensitivity, chemical reactivity, and thermal stability of SU-8 polymer film that was exposed to a shaped electron beam, toward treatment with an oxygen plasma were discussed. The chemical bond and the film were stabilized through polymerization with the help of oxygen plasma. The increase in the dosage of the electron beam or the treatment time of the oxygen plasma was decreased by Fourier transform infrared spectra of epoxy bonds. Using a gradient dosing strategy, convex, concave and spiral structures were successfully formed.
|Number of pages||9|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 1 Mar 2004|