Fabrication of anodic aluminum oxide film on large-area glass substrate

Ching Jung Yang*, Shih Wei Liang, Pu-Wei Wu, Chih Chen, Jia Min Shieh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Fabrication of anodic aluminum oxide (AAO) on 4 in. glass substrate was demonstrated. Using unique structure with quadruple contacts as electrode support during anodization, we reported gradual transformation from opaque aluminum to transparent AAO over the entire substrate. In contrast, partial transformation was observed with typical single contact approach where growth of insulating AAO inhibited subsequent anodization by interrupting current flow from the contact point. Results from optical spectroscope revealed moderate reduction in transmittance after AAO formation. Successful development of large-area AAO on glass substrate opens up opportunities for AAO templated devices that require a large footprint.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Volume10
Issue number12
DOIs
StatePublished - 22 Oct 2007

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