Fabrication of a rotary micromirror for fiber-optic switching

M. Hu*, H. Du, S. Ling, B. Liu, Gih Keong Lau

*Corresponding author for this work

Research output: Contribution to journalArticle

6 Scopus citations


The implementation of all-optical telecommunication networks requires more efficient optical-to-optical wavelength routing devices to replace the conventional optical-to-electrical cross connects. In this paper, we demonstrate a novel rotary micromirror for directly fiber-optic switching. To fabricate this electrostatically actuated rotary micromirror, a very simple micromachining process has been developed using SOI wafer and DRIE technology. Based on this one-mask process, all the components for an NxN cross-connect with 2N-switch-architecture can be fabricated on a monolithic silicon substrate, including the optic fiber couplers, electrostatic comb drives and reflective vertical mirror arrays.

Original languageEnglish
Pages (from-to)987-990
Number of pages4
JournalMicrosystem Technologies
Issue number8-10
StatePublished - 1 Aug 2005


  • Cross connect
  • Optical switching
  • Rotary comb drives
  • Vertical micro mirror

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