Fabrication of 3D photoresist microstructures for the polymer vertical comb drive

Chung Junwei*, Wen-Syang Hsu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Thick photoresist has been widely used to construct the microstructures in many micro-system applications, such as micro channels and micro molds for the electroplated metals in UV-LIGA process. Here, a simple process by combing double-side and multi-partial exposure techniques is proposed to fabricate the suspended 3D photoresist microstructures with uneven thickness. Since the development depth is determined via the control of development, exposure, and soft bake time. Experimental results indicate that longer soft bake time can achieve stable development depth under different development and exposure time. The 3D microstructures and the polymer vertical comb drive (VCD) made of thick photoresist AZ9260® are fabricated here to demonstrate the proposed process. The experimental results show that the electrical conduction of the VCD can be completed by means of the Cu sputtering on the structure surface, and the electrical isolation is achieved via the undercut design.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages635-638
Number of pages4
DOIs
StatePublished - 28 Aug 2007
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 16 Jan 200719 Jan 2007

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Conference

Conference2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period16/01/0719/01/07

Keywords

  • 3D microstructure
  • Comb drive
  • Partial exposure
  • Photoresist

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    Junwei, C., & Hsu, W-S. (2007). Fabrication of 3D photoresist microstructures for the polymer vertical comb drive. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 635-638). [4160401] (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352098