Fabrication and simulation of high-power high-speed Ga0.51In0.49P/GaAs airbridge gate MISFET's grown by GSMBE

Yo Sheng Lin*, Yo Jen Wang, Shey Shi Lu, Chin-Chun Meng

*Corresponding author for this work

Research output: Contribution to conferencePaper

Abstract

Ga0.51In0.49P/GaAs MISFET's, where a Ga0.51In0.49P insulator layer was inserted between the gate metal and the channel layer, were compared with MESFET's experimentally and theoretically in terms of dc and microwave performance. Devices' performance were evaluated by varying the thickness of the insulating layer. Wide and flat characteristics of gm, ft and fmax versus drain current (or gate voltage) together with a high maximum current density (above 610 mA/mm) were achieved for devices with insulator thicknesses (t) of 50 nm and 100 nm. Moreover, the maximum values of ft's and fmax's for a 1 μm gate length device both occurred when t was between 50 nm and 100 nm. We also observed that parasitic capacitances and gate leakage currents were minimized by using the airbridge gate structure, and thus high frequency and breakdown characteristics were greatly improved. These results demonstrate that Ga0.51In0.49P/GaAs airbridge gate MISFET's with insulator thickness between 50 nm and 100 nm were very suitable for microwave high power device applications.

Original languageEnglish
Pages233-236
Number of pages4
DOIs
StatePublished - 1 Dec 1996
EventProceedings of the 1996 18th Annual IEEE Gallium Arsenide Integrated Circuit Symposium - Orlando, FL, USA
Duration: 3 Nov 19966 Nov 1996

Conference

ConferenceProceedings of the 1996 18th Annual IEEE Gallium Arsenide Integrated Circuit Symposium
CityOrlando, FL, USA
Period3/11/966/11/96

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    Lin, Y. S., Wang, Y. J., Lu, S. S., & Meng, C-C. (1996). Fabrication and simulation of high-power high-speed Ga0.51In0.49P/GaAs airbridge gate MISFET's grown by GSMBE. 233-236. Paper presented at Proceedings of the 1996 18th Annual IEEE Gallium Arsenide Integrated Circuit Symposium, Orlando, FL, USA, . https://doi.org/10.1109/GAAS.1996.567876