Fabrication and physical properties of radio frequency sputtereS thin films

Highly oriented (Formula presented)(Formula presented)S thin films with a wurtzite structure were grown by the radio-frequency sputtering technique. The grain size of the (Formula presented)(Formula presented)S thin films was found to decrease with an increase in the Mn concentration x. Moreover, the lattice softening effect due to the quantum size effect, the band-bowing phenomena accounted for by the band-gap correction arising from the chemical disorder, and the exchange interaction between the band carrier and the d electron of the magnetic Mn ions have been investigated.