Fabrication and microstructure of the d.c.-magnetron-sputtered YBa 2 Cu 3 O 7-x superconducting thin films

Horng Show Koo*, Tseung-Yuen Tseng, Wen Ruey Chang, Georage C. Tu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Systematic investigations were conducted to determine the effect of deposition conditions on the microstructure and superconducting properties of YBa 2 Cu 3 O 7-x thin films produced by d.c. magnetron sputtering on (001) MgO substrate. The films were c-axis preferentially oriented with respect to the (001) MgO surface at substrate temperatures of 680-700°C. X-ray diffraction patterns clearly indicated the existence of the c-axis alignment normal to the substrate surface and some second phases. The second phases, including a Cu-rich phase and Y 2 O 3 , were identified by energy dispersive X-ray spectrometer and the microstructures were analysed by electron and atomic force microscopes.

Original languageEnglish
Pages (from-to)67-76
Number of pages10
JournalJournal of Materials Science: Materials in Electronics
Issue number2
StatePublished - 1 Jan 1996

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