Fabrication and ferroelectric properties of BiFeO3/LaNiO 3 artificial superlattice structures grown by radio-frequency magnetron-sputtering

Yen Ting Liu, Shang Jui Chiu, Hsin Yi Lee*, San-Yuan Chen

*Corresponding author for this work

Research output: Contribution to journalArticle

10 Scopus citations


Symmetric superlattice structures of multiferroic BiFeO3 and conductive LaNiO3 sublayers were grown on a Nb-doped SrTiO 3 substrate with radio-frequency magnetron-sputtering. The formation of a superlattice structure was confirmed from the appearance of satellite lines on both sides of the main line in the X-ray diffraction pattern. X-ray measurements show that these superlattice films become subject to greater tensile stress along the c-axis and to increased compressive stress parallel to the surface plane with a decreasing thickness of the sublayer. The smaller is the thickness of the sublayer, the greater is the crystalline quality and the strain state. The hysteresis loops show a large leakage current at frequencies of 0.5 and 1 kHz; the polarization decreases with an increasing frequency.

Original languageEnglish
Pages (from-to)66-70
Number of pages5
JournalThin Solid Films
StatePublished - 1 Feb 2013


  • RF sputtering
  • Superlattice
  • X-ray scattering

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