Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application

Chung Ming Wang*, Chia Hao Kuo, Horng-Chih Lin, Tiao Yuan Huang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH3 monitoring. We can observe the detection signals, including Vth and drain current, when the NH3 is introduced.

Original languageEnglish
Title of host publication4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
StatePublished - 26 Sep 2011
Event4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
Duration: 21 Jun 201124 Jun 2011

Publication series

NameProceedings - International NanoElectronics Conference, INEC
ISSN (Print)2159-3523

Conference

Conference4th IEEE International Nanoelectronics Conference, INEC 2011
CountryTaiwan
CityTao-Yuan
Period21/06/1124/06/11

Keywords

  • gas sensor
  • nanowire TFT
  • Suspended

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