Fabrication and carbon monoxide sensing characteristics of mesostructured carbon gas sensors

Chueh Yang Liu*, Chia Fu Chen, Leu-Jih Perng, Chih Cheng Lu, Kuan Hsun Liao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

We demonstrated a micro-chemoresistive gas sensing device using mesoporous carbon as the sensitive film and immobilized by dielectrophoresis (DEP) process. The mesoporous materials were characterized by X-ray diffraction (XRD) patterns, N2 adsorption-desorption isotherms, scanning electron microscopy (SEM), and transmission electron microscopy (TEM). N2 adsorption-desorption isotherms shows the specific surface area of 1200 m2/g, total pore volume is 1.2 cm3/g of the mesoporous carbon, and the pore size distribution of mesoporous carbon yields an average pore size of 3 nm. SEM images show a rod-like morphology and TEM images show a highly ordered pore channel with linear arrays. CO gas sensor properties were measured and the resulting sensitivities were 5.7, 6.8, 8.8, 11.6, and 37.6% for concentrations of 30, 45, 60, 75, and 90 ppm, respectively. Additionally, this sensor also exhibited high sensitivity and fast response times for CO gas. Crown

Original languageEnglish
Pages (from-to)12-16
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume143
Issue number1
DOIs
StatePublished - 4 Dec 2009

Keywords

  • CO
  • DEP
  • Gas sensor
  • Mesoporous
  • Ordered
  • Pore

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