Extraction of optical constants from maxima of fringing reflectance spectra

Shun-Tung Yen*, Pei Kang Chung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

We propose a scheme to extract the refractive index and the extinction coefficient of dielectrics. The extraction needs only a reflectance spectrum with reliable successive maxima of fringing oscillations measured from a dielectric film that is either freestanding or on metal. With the film thickness known in advance, we determine the refractive index spectrum from the fringing oscillation periods and then the extinction coefficient spectrum from the upper envelope. The method is demonstrated to work well for GaAs and Ge.

Original languageEnglish
Pages (from-to)663-668
Number of pages6
JournalApplied Optics
Volume54
Issue number4
DOIs
StatePublished - 1 Jan 2015

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