Extending the life of planar CMOS with multigate CMOS devices

John O. Borland*, Hiroshi Iwai, Witek Maszara, Howard Wang

*Corresponding author for this work

Research output: Contribution to specialist publicationArticle

1 Scopus citations


The use of multigate CMOS devices for extending the life of planar CMOS is discussed. As the industry continues to scale devices to meet the various system-on-a-chip (SoC) applications in the future, several types of transistor designs from planar to vertical single-gate (SG), double-gate (DG), and multigate (MG) are emerging. The changes for improved device performance which are to be made for its scaling and extendibility are also elaborated.

Original languageEnglish
Number of pages3
Specialist publicationSolid State Technology
StatePublished - Mar 2003

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