Exploring the Correspondence between Chemical States and Adhesion Property for Cr, Co Metal/AZ 4620, BCB Polymer Interface

Yen Hui Hsieh, Yen Jun Huang, Jian Yu Shih, Leu-Jih Perng, Kuan-Neng Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A method is built for describing the relationship between adhesion strength and chemical states of Co/polymer and Cr/polymer interfaces. Based on the chemical bonding model, the adhesion strength is confirmed to be dominated by the metal-organic complex at the interfaces. For Cr/polymers interfaces, the formation of metal-organic complex is restricted by the oxidation of metal atoms during deposition, which leads to almost no variation in adhesion from low [benzocyclobutene(BCB)] to high (AZ 4620) oxygenated polymers. On the other hand, a strong adhesion is observed at the Co/BCB interface that arises from the metal-organic bonds associated with hydroxyl groups in the polymer. The method is expected to provide clear analysis to other metal-polymer interfaces for seeking proper combination in heterogeneous integration.

Original languageEnglish
Article number8258991
Pages (from-to)195-201
Number of pages7
JournalIEEE Transactions on Components, Packaging and Manufacturing Technology
Volume8
Issue number2
DOIs
StatePublished - 1 Feb 2018

Keywords

  • Adhesion
  • heterogeneous integration
  • metal
  • polymer

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