Evaluation of glancing angle X-ray diffraction and MeV 4 He backscattering analyses of silicide formation

S. S. Lau*, W. K. Chu, J. W. Mayer, King-Ning Tu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

57 Scopus citations

Fingerprint Dive into the research topics of 'Evaluation of glancing angle X-ray diffraction and MeV <sup>4</sup> He backscattering analyses of silicide formation'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy