ESD protection design with lateral DMOS transistor in 40-V BCD technology

Chang Tzu Wang*, Ming-Dou Ker

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

An electrostatic discharge (ESD) protection design for smart power applications with lateral double-diffused MOS (LDMOS) transistors is investigated. With the gate-driven and substrate-triggered circuit techniques, the n-channel LDMOS can be quickly turned on to protect the output drivers during an ESD stress event. The proposed gate-driven and substrate-triggered ESD protection circuits have been successfully verified in a 0.35-μm 5 V/40 V bipolar CMOS DMOS (BCD) process, which can sustain ESD voltages of 4 kV in human-body-model (HBM) and 275 V in machine-model (MM) ESD tests. In addition, the power-rail ESD protection design can also be achieved with a stacked structure to protect 40-V power pins without a latchup issue in the smart power integrated circuits.

Original languageEnglish
Article number5604306
Pages (from-to)3395-3404
Number of pages10
JournalIEEE Transactions on Electron Devices
Volume57
Issue number12
DOIs
StatePublished - 1 Dec 2010

Keywords

  • Bipolar CMOS DMOS (BCD) process
  • ESD protection
  • electrostatic discharge (ESD)
  • latchup

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