Epitaxial growth of titanium oxycarbide on MgO (0 0 1) substrates by pulsed laser deposition

Hien Do*, Tzu Chun Yen, Chih Sheng Tian, Yue Han Wu, Li Chang

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

Epitaxial TiC x O y thin films were grown on MgO (0 0 1) substrates by using pulsed laser deposition method. High-resolution X-ray diffraction and transmission electron microscopy were used to examine crystallinity and microstructure of epitaxial TiC x O y film on MgO. The chemical composition of the film is determined to be x ∼ 0.47 and y ∼ 0.69 by X-ray photoelectron spectroscopy. Atomic force microscopy revealed that the surface of TiC x O y film is very smooth with roughness of 0.18 nm. The resistivity of the TiC x O y film measured by four-point-probe method was about 137 μ Ω cm.

Original languageEnglish
Pages (from-to)2990-2994
Number of pages5
JournalApplied Surface Science
Volume257
Issue number7
DOIs
StatePublished - 1 Jan 2011

Keywords

  • Epitaxial growth
  • Pulsed laser deposition
  • Titanium oxycarbide

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