Emission characteristics and control efficiency of acidic and basic gases and aerosols from packed towers

Chuen-Tinn Tsai*, Chang Tso Chang, Tsing Wei Liu, Chun Chao Huang, Chih Liang Chien, Hung Min Chein

*Corresponding author for this work

Research output: Contribution to journalArticle

15 Scopus citations

Abstract

Large amount of acidic liquids, such as H 2 SO 4 , HF, HCl and HNO 3 , and basic NH 3 liquid are used in high-tech industries in cleaning and etching processes in the Hsinchu Science-Based Industrial Park in Taiwan. The industries use packed towers (or scrubbers) to control emission of these inorganic pollutants, in which acidic gases but not particles are regulated by the Taiwan EPA's strict emission standard for semiconductor industry. To understand whether the emission standard is met and to investigate the emission rates, emission profiles, emission factors, and control efficiencies of various gaseous/aerosol species, measurement of pollutants before and after the packed towers was conducted using a sensitive porous metal sampler during January 2001 to February 2003. Results show that the pollutants are mainly in the gaseous phase, and the control efficiency of pollutants is low and variable when the inlet concentration is low. In addition to the control efficiency data, emission factors before the control device for various gas and particle species have also been developed for estimating the emission rates.

Original languageEnglish
Pages (from-to)643-646
Number of pages4
JournalAtmospheric Environment
Volume38
Issue number4
DOIs
StatePublished - 1 Jan 2004

Keywords

  • Acidic aerosols
  • Air pollution control
  • Emission factor
  • Semiconductor manufacturing

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