Elongation of arrays of amorphous carbon tubes

Lung Shen Wang, Chia Hsin Wang, Chih Wei Peng, Chi Young Lee, Hsin-Tien Chiu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

A process to grow amorphous carbon (a-C) tubes (a-CT) by coupling two fabrication methods was presented. A layer of short aligned a-CT was deposited by LPCVD from SiCl3CCl3 on an AAO substrate. The tubes were significantly elongated by employing the Na-filled AAO reactive template method. The average thickness of the array layer was estimated to be 800 nm, which was much thinner than the AAO thickness of 60 μm. The composition of the isolated tube array layer was confirmed to be carbon using energy dispersive spectroscopy (EDS). A successful deposition of a-C on AAO in the form of short a-CT was reported.

Original languageEnglish
Pages (from-to)2618-2621
Number of pages4
JournalCarbon
Volume43
Issue number12
DOIs
StatePublished - 1 Oct 2005

Keywords

  • Carbon nanotubes
  • Chemical vapor deposition
  • Electron microscopy

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