Elimination of stress induced oxide leakage in textured tunneling oxide

Reza Rofan*, Jack Churchill, Chen-Ming Hu, Yupin Fong

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1843-1844
Number of pages2
JournalSolid State Electronics
Volume35
Issue number12
DOIs
StatePublished - 1 Jan 1992

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