Electrothermal microgripper with large jaw displacement and integrated force sensors

T. Chu Duc*, Gih Keong Lau, J. F. Creemer, P. M. Sarro

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations

Abstract

This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force sensing cantilever beams which can monitor the displacement of the microgripper jaws and also the contact force between the tips and the gripped object. A jaw motion up to 32 μm with an output sensing voltage of 49 mV and 114 mW power consumption is measured at a driving voltage of 4.5 V. The working temperature of the structure is then 177°C. The force sensitivity is 1.7 V/N and the corresponding displacement sensitivity is 1.5 kV/m. A minimum detectable displacement and a minimum detectable force of 1 nm and 770 nN are estimated, respectively.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages519-522
Number of pages4
DOIs
StatePublished - 29 Aug 2008
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period13/01/0817/01/08

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    Chu Duc, T., Lau, G. K., Creemer, J. F., & Sarro, P. M. (2008). Electrothermal microgripper with large jaw displacement and integrated force sensors. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 519-522). [4443707] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443707