Electroplating process of Ni-CNTS nanocomposite for MEMS resonator fabrication

Yi Chia Lee*, Yu-Ting Cheng, Wen-Syang Hsu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The paper presents an electroplating process for Ni-Carbon Nanotubes (CNTs) nanocomposite micro-resonator (or μ-resonator) fabrication. Two kinds of chemical treatments, H2SO4/H2O2 and Sodium dodecyl sulfate (SDS) have been utilized for the surface modification of CNTs, respectively. The resonant frequency and Q factor of the SDS treated Ni-CNTs nanocomposite resonators are 30.65 kHz and 221, respectively. The values are higher than that of the one made of pure Ni and the H2SO 4/H2O2 mixture treated Ni-CNTs nanocomposite. They are 29.35 kHz, 190, and 30.35 kHz, 198, respectively. The experimental results indicate a better dispersion treatment on the CNTs in an electroplating bath could result in more incorporated CNTs in the Ni matrix and exhibit better improvement of device performance.

Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages416-419
Number of pages4
DOIs
StatePublished - 13 Apr 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 23 Jan 201127 Jan 2011

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period23/01/1127/01/11

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