Electroplated Ni-CNT nanocomposite for micromechanical resonator applications

Yi Chia Lee*, Ming Huang Li, Yu-Ting Cheng, Wen-Syang Hsu, Sheng Shian Li

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show ∼ 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.

Original languageEnglish
Article number6184271
Pages (from-to)872-874
Number of pages3
JournalIEEE Electron Device Letters
Volume33
Issue number6
DOIs
StatePublished - 24 Apr 2012

Keywords

  • Electroplated Ni-CNT nanocomposite
  • microelectromechanical systems (MEMS)
  • quality factor
  • resonant frequency
  • resonator

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