A vacancy relaxation model which predicts the DC lifetime, pulse DC lifetime, and AC lifetime for all waveforms and all frequencies above 10 kHz is proposed. The AC lifetimes of aluminum interconnect are experimentally found to be more than 103 times larger than DC lifetime at the same current density. AC stress lifetimes have the same dependences on current magnitude and temperature, for T ≤300°C, as the DC stress lifetime.
|Number of pages||5|
|State||Published - 1 Dec 1989|
|Event||27th Annual Proceedings: Reliability Physics - 1989 - |
Duration: 11 Apr 1989 → 11 Apr 1989
|Conference||27th Annual Proceedings: Reliability Physics - 1989|
|Period||11/04/89 → 11/04/89|