Electrochemically Synthesized Nanocomposites for MEMS Device Performance Enhancement

C. C. Chen, Yu-Ting Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a performance enhancement scheme of MEMS devices is presented based on the implementation of electrochemically synthesized nanocomposites including Ni-diamonds, Ni-CNTs, NiFe-AAO CoNiMnP -AAO etc.. Via the incorporation of nano-sized materials, the matrix material as a part of devices structure can exhibit distinct physical characteristics resulting from composite and shape effects for better device performance. Owing to the process advantages of low temperature and high compatibility with wafer-level CMOS process, the cost-effective electrochemical process technology has shown its potential for various MEMS applications.

Original languageEnglish
Title of host publication2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings
EditorsTing-Ao Tang, Fan Ye, Yu-Long Jiang
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538644409
DOIs
StatePublished - 5 Dec 2018
Event14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Qingdao, China
Duration: 31 Oct 20183 Nov 2018

Publication series

Name2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings

Conference

Conference14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018
CountryChina
CityQingdao
Period31/10/183/11/18

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    Chen, C. C., & Cheng, Y-T. (2018). Electrochemically Synthesized Nanocomposites for MEMS Device Performance Enhancement. In T-A. Tang, F. Ye, & Y-L. Jiang (Eds.), 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings [8565023] (2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSICT.2018.8565023