Electrical performance enhancement of a-AZTO by a low temperature Treatment

Po-Tsun Liu, Chur Shyang Fuh, Li Feng Teng, Yang Shun Fan, Chih Hsiang Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this study, a supercritical fluid (SCF) technology is proposed to enhance the electrical performance and reliability of a-AZTO TFTs. The SCF provides liquid-like solvency and gas-like diffusivity, giving it transport capacity to take the H 2 O molecules into films and terminate the traps in films by the oxidization.

Original languageEnglish
Title of host publication20th International Display Workshops 2013, IDW 2013
PublisherInternational Display Workshops
Pages358-360
Number of pages3
ISBN (Electronic)9781510827783
StatePublished - 1 Jan 2013
Event20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan
Duration: 3 Dec 20136 Dec 2013

Publication series

NameProceedings of the International Display Workshops
Volume1
ISSN (Print)1883-2490

Conference

Conference20th International Display Workshops 2013, IDW 2013
CountryJapan
CitySapporo
Period3/12/136/12/13

Keywords

  • AZTO
  • Low temperature treatment
  • SCF

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