Electrical characteristics of polyoxide prepared by N2 preannealing

Kow-Ming Chang, Tzyh Cheang Lee, Jiann Yu Wang

Research output: Contribution to journalArticle

Abstract

This paper reports on the electrical characteristics of polyoxide with preoxidation N2 annealing in a rapid thermal annealing system. By treating the polysilicon film before oxidation, the obtained polyoxide has the desired relative characteristics, i.e., a higher breakdown electric field, a smaller voltage shift, and larger charge-to-breakdown. This improvement is due to the reduction of defects, such as microtwins, inside the grain.

Original languageEnglish
Pages (from-to)39-40
Number of pages2
JournalElectrochemical and Solid-State Letters
Volume3
Issue number1
DOIs
StatePublished - 1 Jan 2000

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