Effects of RCA clean-up procedures on the formation of roughened poly-Si electrodes for high-density DRAMs' capacitors

Han Wen Liu*, Wen Koi Lai, Swei Yang Yu, Stewart C. Huang, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy