Effects of Nb and Sr doping on crystal structure of epitaxial BaTiO3 thin films on MgO substrates

Yongsam Kim*, Chun-Hua Chen, Atsushi Saiki, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

*Corresponding author for this work

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

Niobium (Nb) and strontium (Sr) doped barium titanate (BT) films were deposited by radio frequency (RF) magnetron sputtering with Nb and Sr doped BT ceramic targets, respectively. The effect of Nb and Sr doping on the crystal structure of epitaxial BaTiO3 thin films on MgO substrates was investigated. The crystal structure of the films was examined using the reciprocal space mapping measurement. All the films exhibit a cube-on-cube relation with respect to the substrates. As the amount of doped Sr increased, both of the in-plane and out-of-plane lattice constants of Sr doped BT films slowly approached the BT bulk values. On the other hand, the lattice constants of Nb doped BT films were rapidly coming close to the bulk values. These indicated that the lattices of doped BT films were relaxed as the amount of doped elements increased. In addition, Nb doping had greater influence on the relaxation of the films than Sr doping for the same content of dopant.

Original languageEnglish
Pages (from-to)1499-1503
Number of pages5
JournalJournal of Physics D: Applied Physics
Volume35
Issue number13
DOIs
StatePublished - 7 Jul 2002

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