Effects of low-temperature NH3 treatment on the characteristics of HfO2/SiO2 gate stack

Wen Tai Lu*, Chao-Hsin Chien, Ing Jye Huang, Ming Jui Yang, Peer Lehnen, Tiao Yuan Huang

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

The effects of postdeposition low-temperature (~400°C) NH3 treatment (LTN treatment) on the characteristics of the HfO2/SiO 2 gate stack with the TiN gate electrode were studied in this work. After the HfO2 films were deposited using an AIXTRON Tricent atomic vapor deposition system, the LTN treatment was performed prior to the postdeposition annealing (PDA) step to prevent the growth of an additional interfacial layer, which is known to accompany the traditional high-temperature nitridation technique. The effective electrical oxide thickness for the devices annealed at 700°C PDA, either with or without LTN treatment, was estimated to be about 2.2 and 2.3 nm, respectively, without considering quantum effects. It was found that the LTN treatment effectively improves the characteristics of the HfO2/SiO2 stack gates, such as capacitance-voltage (C-V) characteristics, frequency dispersion, trap generation rate, and dielectric breakdown voltage even at the high PDA temperature of 700°C.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume152
Issue number11
DOIs
StatePublished - 2 Dec 2005

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