Effects of CoSi2 on p+ polysilicon gates fabricated by BF2 + implantation into CoSi/amorphous Si bilayers

Huang-Chung Cheng*, Wen Koi Lai, Han Wen Liu, Miin Horng Juang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Effects of CoSi<sub>2</sub> on p<sup>+</sup> polysilicon gates fabricated by BF<sub>2</sub> <sup>+</sup> implantation into CoSi/amorphous Si bilayers'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science