Effects of accumulated laser pulses on (Pb,Sr)TiO3 films post-excimer laser annealed at low temperatures

Jyh Liang Wang*, Yi Sheng Lai, Bi Shiou Chiou, Der Chi Shye, Chuan Chou Hwang, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

In this article, we report the effect of excimer laser annealing (ELA) on the characteristics of (Pb,Sr)TiO3 (PSrT) films. The unirradiated and irradiated films are characterized by atomic force microscope (AFM), X-ray photoelectron spectroscopy, X-ray diffractometer (XRD), transmission electron microscopy (TEM), and electron energy loss spectroscopy (EELS). It is found that the crystallinity is improved and the oxygen content is increased by ELA. Besides, the surface morphology becomes rough after ELA. Moreover, PSrT films irradiated by ELA are found to increase the grain size near the surface. The material properties of unirradiated and irradiated films, as well as the characteristics of PSrT films irradiated with various laser pulses, will be explored in this study.

Original languageEnglish
Pages (from-to)80-85
Number of pages6
JournalJournal of Crystal Growth
Volume306
Issue number1
DOIs
StatePublished - 1 Aug 2007

Keywords

  • A3. Excimer laser annealing (ELA)
  • B1. Lead-strontium titanate
  • B3. Ferroelectric

Fingerprint Dive into the research topics of 'Effects of accumulated laser pulses on (Pb,Sr)TiO<sub>3</sub> films post-excimer laser annealed at low temperatures'. Together they form a unique fingerprint.

  • Cite this