In this article, we report the effect of excimer laser annealing (ELA) on the characteristics of (Pb,Sr)TiO3 (PSrT) films. The unirradiated and irradiated films are characterized by atomic force microscope (AFM), X-ray photoelectron spectroscopy, X-ray diffractometer (XRD), transmission electron microscopy (TEM), and electron energy loss spectroscopy (EELS). It is found that the crystallinity is improved and the oxygen content is increased by ELA. Besides, the surface morphology becomes rough after ELA. Moreover, PSrT films irradiated by ELA are found to increase the grain size near the surface. The material properties of unirradiated and irradiated films, as well as the characteristics of PSrT films irradiated with various laser pulses, will be explored in this study.
- A3. Excimer laser annealing (ELA)
- B1. Lead-strontium titanate
- B3. Ferroelectric