Effectiveness of Si seed for selective SiGe epitaxial deposition in recessed source and drain for locally strained pMOS application

Po Lun Cheng*, Chin I. Liao, Hou Ren Wu, Yi G. Chen, Chin Cheng Chien, Chan Lon Yang, S. F. Tzou, Jinsong Tang, Yonah Cho, Errol Sanchez, Vincent C. Chang, Tony Fu, Wen-Syang Hsu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science