Effect of ZnO seed layers on the solution chemical growth of ZnO nanorod arrays

Sea Fue Wang*, Tseung-Yuen Tseng, Yuh Ruey Wang, Chun Yun Wang, Hsi Chan Lu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

47 Scopus citations


High density ZnO nanorod arrays were grown on Si substrates coated with ZnO seed layers via aqueous solution route. The ZnO seed layers were deposited on the substrate using DC reactive sputtering and RF magnetron sputtering. It was found that ZnO seed layer with (1 0 3) preferred orientation, prepared using DC reactive sputtering, did not facilitate the formation of ZnO nanorods in the solution grown process. Prior seeding of the surface by ZnO layer with (0 0 2) preferred orientation, deposited using RF magnetron sputtering, leads to nucleation sites on which ZnO nanorod arrays can grow in a highly aligned fashion. ZnO nanorods with well-defined hexagonal facets (0 0 2) were grown almost vertically over the entire substrate. The uniformity and alignment of the nanorod arrays are strongly related to the properties of underneath ZnO seed layers.

Original languageEnglish
Pages (from-to)1255-1260
Number of pages6
JournalCeramics International
Issue number3
StatePublished - 1 Apr 2009


  • Growth from solution
  • Nanomaterials
  • Oxide
  • X-ray diffraction

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