Effect of thermal treatment on physical, electrical properties and reliability of porogen-containing and porogen-free ultralow-k dielectrics

Yu Min Chang, Wei Yuan Chang, Jun Fu Huang, Leu-Jih Perng, Yi Lung Cheng*

*Corresponding author for this work

Research output: Contribution to journalArticle

13 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy