Effect of process variation on field emission characteristic in surface conduction electron-emitters

Hsiang Yu Lo, Yiming Li*, Hsueh Yung Chao, Chih Hao Tsai, Fu-Ming Pan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this work, we explore the effect of process variation on field emission characteristics in surface conduction electron-emitters. The structure of palladium thin-film emitter is fabricated on the substrate and the nanometer scaled gap is formed by the focused ion beam (FIB) technique. Different shapes of nanogaps due to the process variations are investigated by the experiment and 3D Maxwell particle-in-cell simulation. Four deformation structures are examined, and it is found that the Type 1 exhibits high emission efficiency due to a stronger electric field around the apex and larger the emission current among structures. The electron emission current is dependent upon the angle of inclination of surface.

Original languageEnglish
Title of host publication2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
Pages353-356
Number of pages4
DOIs
StatePublished - 1 Dec 2007
Event2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007 - Hong Kong, China
Duration: 2 Aug 20075 Aug 2007

Publication series

Name2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

Conference

Conference2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007
CountryChina
CityHong Kong
Period2/08/075/08/07

Keywords

  • Focused ion beam
  • Palladium
  • Particle-in-cell simulation
  • Process variation
  • Surface conduction electron emitter

Fingerprint Dive into the research topics of 'Effect of process variation on field emission characteristic in surface conduction electron-emitters'. Together they form a unique fingerprint.

  • Cite this

    Lo, H. Y., Li, Y., Chao, H. Y., Tsai, C. H., & Pan, F-M. (2007). Effect of process variation on field emission characteristic in surface conduction electron-emitters. In 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings (pp. 353-356). [4601207] (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings). https://doi.org/10.1109/NANO.2007.4601207