Effect of oxygen absorption on contact resistance between metal and carbon nano tubes (CNTs)

Bing-Yue Tsui*, Chien Li Weng, Chih Lien Chang, Jeng Hua Wei, Ming Jinn Tsai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Contact resistance (Ro) between metal and carbon nanotubes (CNTs) is studied extensively. Metal oxide formation at interface due to oxygen absorption plays very important role. Chemically inert metals such as Pt and Au results in the lowest Rc. Adding Ta into Pt can solve the adhesion issue while keeps low Rc. Those metals can break metal oxide and form metal carbide are also preferred.

Original languageEnglish
Title of host publication2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA - Proceedings of Technical Papers
Pages86-87
Number of pages2
DOIs
StatePublished - 1 Dec 2006
Event2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA - Hsinchu, Taiwan
Duration: 24 Apr 200626 Apr 2006

Publication series

NameInternational Symposium on VLSI Technology, Systems, and Applications, Proceedings

Conference

Conference2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA
CountryTaiwan
CityHsinchu
Period24/04/0626/04/06

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    Tsui, B-Y., Weng, C. L., Chang, C. L., Wei, J. H., & Tsai, M. J. (2006). Effect of oxygen absorption on contact resistance between metal and carbon nano tubes (CNTs). In 2006 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA - Proceedings of Technical Papers (pp. 86-87). [4016614] (International Symposium on VLSI Technology, Systems, and Applications, Proceedings). https://doi.org/10.1109/VTSA.2006.251078