Effect of hydrogen on deposition of tantalum nitride thin films from ethylimidotantalum complex

Hsin-Tien Chiu*, Wen Ping Chang

*Corresponding author for this work

Research output: Contribution to journalArticle

17 Scopus citations
Original languageEnglish
Pages (from-to)570-572
Number of pages3
JournalJournal of Materials Science Letters
Volume11
Issue number9
DOIs
StatePublished - 1 Jan 1992

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