Effect of different properties of Cu(In1-xGax)Se2 thin films synthesized by femtosecond and nanosecond pulsed laser deposition

Mu Gong Tsai, Chia Chuan Chen, You Jyun Chen, In Gann Chen*, Xiaoding Qi, Jung Chun Huang, Cen Ying Lin, Chung-Wei Cheng

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two kinds of pulsed laser sources, femtosecond laser (fs laser) and nanosecond laser (ns laser), were used in the pulsed laser deposition (PLD) system to synthesize copper indium gallium selenium (CIGS) thin films at the substrate temperature from room temperature (RT) and 500°C. Different surface morphology, crystallinity, and stoichiometric ratio were observed on CIGS thin films deposited by femtosecond pulsed laser deposition (fs-PLD) and nanosecond pulsed laser deposition (ns-PLD) respectively, that resulted in different optical and electrical properties. It is proposed that the laser absorption of CIGS target with different laser wavelength caused the difference in laser penetration depths into the target, so that the stoichiometric ratio of the evaporated materials splashing from the target were different between fs-PLD and ns-PLD processes.

Original languageEnglish
Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
EditorsStephan Roth, Xianfan Xu, Yoshiki Nakata, Beat Neuenschwander
PublisherSPIE
ISBN (Electronic)9781628414400
DOIs
StatePublished - 1 Jan 2015
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9350
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
CountryUnited States
CitySan Francisco
Period9/02/1512/02/15

Keywords

  • CIGS
  • femtosecond laser
  • nanosecond laser
  • pulsed laser deposition

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  • Cite this

    Tsai, M. G., Chen, C. C., Chen, Y. J., Chen, I. G., Qi, X., Huang, J. C., Lin, C. Y., & Cheng, C-W. (2015). Effect of different properties of Cu(In1-xGax)Se2 thin films synthesized by femtosecond and nanosecond pulsed laser deposition. In S. Roth, X. Xu, Y. Nakata, & B. Neuenschwander (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX [935019] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9350). SPIE. https://doi.org/10.1117/12.2076554