Effect of depositing tin oxide thin film in liquid phase and dip-coating Cu and Au catalysts on H 2 S gas-sensing performance

Jin-Chern Chiou, Sheng Wei Tsai*, Ya Shu Liu, Chen Tang Huang

*Corresponding author for this work

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

In this study, unlike conventional methods used to grow gas sensor films, a liquid-phase deposition method was used to deposit fluorine-doped tin oxide as the sensing material of a gas sensor. Furthermore, silica was doped into the film as an inhibitor to prevent the grain growth of tin oxide during the calcination process. This structure can be used to improve the sensitivity of a H 2 S sensor. By adding a moderate quantity of copper and gold catalysts on the surface of film, the sensitivity can be dramatically improved.

Original languageEnglish
Pages (from-to)425-433
Number of pages9
JournalSensors and Materials
Volume20
Issue number8
DOIs
StatePublished - 1 Dec 2008

Keywords

  • Catalyst
  • Gas sensor
  • LPD
  • Porous
  • Tin oxide

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