Effect of bridging and terminal alkyl groups on structural and mechanical properties of porous organosilicate films

R. Nenashev, Yingjie Wang, Chunhui Liu, N. Kotova, K. Vorotilov, Jing Zhang, Shuhua Wei, D. Seregin, A. Vishnevskiy, Leu-Jih Perng, M. R. Baklanov

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Chemical composition, pore structure and mechanical properties of porous organosilicate low-k films with terminal and bridging organic groups are studied. It is shown that BTMSE based low-k films with alkyl bridge between the Si atoms have non-uniform pore structure with internal voids (ink-bottle like pores) while the films with terminal alkyl groups have pores with cylindrical shape. All studied spin-on deposited films have better mechanical properties than PECVD films with similar chemical composition and porosity. The best mechanical properties showed alkyl bridged low-k films. Moreover, the Young’s modulus increases with BTMSE content because of higher concentration of bridging bonds.

Original languageEnglish
Pages (from-to)N182-N188
JournalECS Journal of Solid State Science and Technology
Volume6
Issue number10
DOIs
StatePublished - 1 Jan 2017

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