ECS Transactions: Preface

C. L. Claeys, H. Iwai, M. Tao, J. Murota, J. J. Liou, S. Deleonibus

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	iii
Journal	ECS Transactions
Volume	11
Issue number	6
State	Published - 2007
Event	5th International Symposium on ULSI Process Integration - 212th ECS Meeting - Washington, DC, United States Duration: 7 Oct 2007 → 12 Oct 2007

Cite this

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title = "ECS Transactions: Preface",

author = "Claeys, {C. L.} and H. Iwai and M. Tao and J. Murota and Liou, {J. J.} and S. Deleonibus",

year = "2007",

language = "English",

volume = "11",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "6",

note = "null ; Conference date: 07-10-2007 Through 12-10-2007",

}

TY - JOUR

T1 - ECS Transactions

AU - Claeys, C. L.

AU - Iwai, H.

AU - Tao, M.

AU - Murota, J.

AU - Liou, J. J.

AU - Deleonibus, S.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=45749154558&partnerID=8YFLogxK

M3 - Editorial

AN - SCOPUS:45749154558

VL - 11

SP - iii

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-5862

IS - 6

Y2 - 7 October 2007 through 12 October 2007

ER -