ECS Transactions: Preface

M. Öztürk*, H. Iwai, D. L. Kwong, P. J. Timans, E. P. Gusev, S. J. Koester, F. Roozeboom

*Corresponding author for this work

Research output: Contribution to journalEditorial

1 Scopus citations
Original languageEnglish
Pages (from-to)iii
JournalECS Transactions
Volume6
Issue number1
StatePublished - 2007
EventInternational Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3 - 211th ECS Meeting - Chicago, IL, United States
Duration: 6 May 200710 May 2007

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