Dynamic characteristics measurement system for optical scanning micromirror

Jin-Chern Chiou*, Y. C. Lin, Y. C. Chang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behaviors such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the scanning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.

Original languageEnglish
Pages (from-to)180-186
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4230
DOIs
StatePublished - 1 Dec 2000
EventMicromachining and Microfabrication - Singapure, Singapore
Duration: 28 Nov 200030 Nov 2000

Keywords

  • Optical performance of micromirror
  • Scan angle
  • Scan non-linearity
  • Scan speed
  • Scanning micromirror

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