DRY-PROCESSING INDUCED ISOLATION-DEGRADATION IN GaAs INTEGRATED CIRCUITS.

Mau-Chung Chang*, C. P. Lee, N. H. Sheng, C. G. Kirkpatrick, R. T. Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds