Distinct correlation between CeO2 and YSZ in out-of-plane and in-plane mosaic dispersions of heteroepitaxial CeO2/YSZ/Si(001) films

Chun-Hua Chen, A. Saiki, N. Wakiya, K. Shinozaki, N. Mizutani

Research output: Contribution to journalArticlepeer-review

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Abstract

The structural correlations including the lattice constants and the mosaic dispersions between CeO2 and yttria-stabilized ZrO2 (YSZ) in CeO2/YSZ/Si(001) heteroepitaxial films have been investigated by out-of-plane and in-plane X-ray-diffraction techniques. The distinct linear correlations of the full width at half-maximum (FWHM) of the ω scan between CeO2 and YSZ have been found in both directions. CeO2 always has a 0.7° lower FWHM of the ω scan than YSZ in the out-of-plane direction, bur has a 2.6° higher FWHM in the in-plane direction. A possible relationship between the out-of-plane and in-plane FWHMs of the ω scans has been demonstrated with a lattice-rotation model. Besides, the lattice constants of CeO2 are dependent on the FWHMs of the YSZ ω scans: as the FWHM is below 3.5°, CeO2 has a tetragonal distortion, and as the FWHM is higher than 3.5°, CeO2 exhibits a cubic structure without distortion. The results are of great interest, both for the fundamental understanding of the film-growth mechanisms and for potential applications.

Original languageEnglish
Pages (from-to)693-697
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume74
Issue number5
DOIs
StatePublished - 1 Jan 2002

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