Direction of silicon technology from past to future

H. Iwai*

*Corresponding author for this work

Research output: Contribution to conferencePaper

7 Scopus citations

Abstract

Information Technology (IT) continue to dramatically raise the efficiency of the society and greatly improve the quality of life. In general, the progress of IT entirely owes to that of semiconductor technology, especially, Silicon LSIs. Without the marvellous progress of LSI technologies, today's great success in IT would not be realized at all. This paper reviews the silicon technology, from past to future, for advanced CMOS LSIs.

Original languageEnglish
Pages1-35
Number of pages35
StatePublished - 2001
Event8th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2001) - Singapure, Singapore
Duration: 9 Jul 200113 Jul 2001

Conference

Conference8th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2001)
CountrySingapore
CitySingapure
Period9/07/0113/07/01

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