Information Technology (IT) continue to dramatically raise the efficiency of the society and greatly improve the quality of life. In general, the progress of IT entirely owes to that of semiconductor technology, especially, Silicon LSIs. Without the marvellous progress of LSI technologies, today's great success in IT would not be realized at all. This paper reviews the silicon technology, from past to future, for advanced CMOS LSIs.
|Number of pages||35|
|State||Published - 2001|
|Event||8th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2001) - Singapure, Singapore|
Duration: 9 Jul 2001 → 13 Jul 2001
|Conference||8th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2001)|
|Period||9/07/01 → 13/07/01|