Direct CoSi2 thin-film formation with homogeneous nanograin-size distribution by oxide-mediated silicidation

Juin Jie Chang, Chuan Pu Liu*, Shih Wei Chen, Chih Chia Chang, Tsung-Eong Hsien, Ying Lang Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations
Original languageEnglish
Pages (from-to)2299-2302
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number5
DOIs
StatePublished - 1 Jan 2004

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