Development of vertical electrostatic comb-drive actuator using magnified cascade configuration

Jin-Chern Chiou*, Chin Fu Kuo

*Corresponding author for this work

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

In this study, a vertical electrostatic comb-drive actuator with a novel cascade configuration called cascade vertical combdrive actuator (CVCA) is developed to magnify the actuation stroke. The CVCA combines vertical comb-drive actuators and multi-stage structures to form a stacked actuation configuration that can be used to overcome the stroke constraint of the traditional vertical comb-drive actuator. To implement the CVCA, the Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 μm two polysilicon layers and four metal layers (2p4m) complementary metal-oxide-semiconductor (CMPS) fabrication processes and post-CMCS micromachining steps are employed to fabricate the device. Due to the multilayer characteristic of the microstructure, the proposed CVCA can achieve the vertical motion and cascade structures. The experimental results indicated that the stroke of the proposed CVCA can be magnified three times as compared with that of the standard vertical comb drive with the same chip size.

Original languageEnglish
Pages (from-to)6546-6549
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number10 A
DOIs
StatePublished - 9 Oct 2007

Keywords

  • CMOS-MEMS
  • Cascade
  • Comb-drive actuator
  • MEMS
  • Vertical

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