Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator

Jin-Chern Chiou, C. F. Kuo, Y. J. Lin, C. W. Chang, K. C. Hou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this study, a novel cascade structure for improving the stroke of electrostatic comb-drive actuator is proposed. With the cascade configuration, the stroke can be improving efficiency. The proposed actuators were fabricated through CMOS processes and post-CMOS micromachining steps. Experimental results indicated that the stroke of the lateral and vertical cascade electrostatic comb-drive actuators can be improved 180% and 188% respectively without adding extra driving voltage. These results demonstrated that the proposed cascade configurations have the capability to improve the actuation stroke of electrostatic actuators.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages471-474
Number of pages4
DOIs
StatePublished - 29 Aug 2008
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period13/01/0817/01/08

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    Chiou, J-C., Kuo, C. F., Lin, Y. J., Chang, C. W., & Hou, K. C. (2008). Development of novel cascade structure for improving stroke of electrostatic comb-drive actuator. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 471-474). [4443695] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443695